Plasma Cleaner:
Plasma-Surface Interaction
Ablation
- Plasma ablation involves the mechanical removal of surface contaminants by energetic electron
and ion bombardment
- Surface contamination layers (e.g. cutting oils, skin oils, mold releases) are typically
comprised of weak C-H bonds
- Ablation breaks down weak covalent bonds in polymeric contaminants through mechanical
bombardment
- Surface contaminants undergo repetitive chain scission until their molecular weight is
sufficiently low for them to boil away in the vacuum
- Ablation affects only the contaminant layers and the outermost molecular layers of the substrate
material
- Argon is often used for its high ablation efficiency and chemical inertness with the surface material
Activation
- Plasma surface activation involves the creation of surface chemical functional groups through
the use of plasma gases - such as oxygen, hydrogen, nitrogen and ammonia - which dissociate and
react with the surface
- In the case of polymers, surface activation involves the replacement of surface polymer groups
with chemical groups from the plasma gas
- The plasma breaks down weak surface bonds in the polymer and replaces them with highly reactive
carbonyl, carboxyl, and hydroxyl groups
- Such activation alters the chemical activity and characteristics of the surface, such as
wetting and adhesion, yielding greatly enhanced adhesive strength and permanency
Crosslinking
- Cross-linking is the setting up of chemical links between the molecular chains of polymers
- Plasma processing with inert gases can be used to cross-link polymers and produce a stronger and
harder substrate microsurface
- Under certain circumstances, crosslinking through plasma treatment can also lend additional wear
or chemical resistance to a material
Deposition
- Plasma deposition involves the formation of a thin polymer coating at the substrate surface
through polymerization of the process gas
- The deposited thin coatings can possess various properties or physical characteristics, depending
on the specific gas and process parameters selected
- Such coatings exhibit a higher degree of crosslinking and much stronger adherence to the
substrate in comparison to films derived from conventional polymerization