PDC-FMG (115V); PDC-FMG-2 (230V)
Dual gas feeds for process gas mixing
Dual process gas flowmeters
49 mL/min and 104 mL/min maximum flowrate for atmospheric air (0 psig) *
±2% full scale accuracy
Thermocouple vacuum gauge and digital meter (1 to 1999 mTorr pressure range)
Weight: 7 lbs
Size: 8.5" H x 10" W x 8" D
* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available. Please inquire with Harrick Plasma.
Not intended for pumping oxygen; see below for suitable Oxygen Service Pumps
PDC-VP (115V); PDC-VP-2 (230V)
Premium Quality Model (higher reliability)
Pumping Speed (50/60 Hz): 3.2/3.6 m3/hr
Ultimate Total Pressure (gas ballast closed): 1.5 mTorr
Ultimate Total Pressure (gas ballast open): 23 mTorr
Motor Power (50/60 Hz): 250/300 W
Weight: 34 lbs
Size: 9" H x 15" W x 5" D
PDC-VP-OIL (1 quart)
Replacement oil for Premium Quality Vacuum Pumps PDC-VP, PDC-VP-2
PDC-VPE (115V); PDC-VPE-2 (230V)
Basic Model (lower cost)
Pumping Speed (50/60 Hz): 5.1 m3/hr
Ultimate Total Pressure (gas ballast closed): 7.5 mTorr
Ultimate Total Pressure (gas ballast open): 150 mTorr
Motor Power (50/60 Hz): 373 W
Weight: 27 lbs
Size: 9.75" H x 14" W x 5.5" D
PDC-VPE-OIL (1 quart)
Replacement oil for Basic Vacuum Pumps PDC-VPE, PDC-VPE-2
PDC-OPF (115V); PDC-OPF-2 (230V)
Fomblin-Based Vacuum Pump for Oxygen Service (not including Fomblin Fluid)
Pumping speed (50/60 Hz): 3.3/3.9 m3/hr
Ultimate total pressure (gas ballast closed): 1.5 mTorr
Ultimate total pressure (gas ballast open): 90 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 48 lbs
Dimensions: 9" H x 17" W x 6" D
PDC-FMB (1kg; 0.532L)
Fomblin Fluid for Fomblin-Based Vacuum Pump PDC-OPF, PDC-OPF-2
PDC-OPD (115V); PDC-OPD-2 (230V)
Dry Scroll Vacuum Pump for Oxygen Service
Uses no oil or fluid
Pumping speed (50/60 Hz): 4.8/6 m3/hr
Ultimate total pressure (gas ballast closed; 50/60 Hz): 53/45 mTorr
Ultimate total pressure (gas ballast open; 50/60 Hz): 263/225 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 51 lbs
Dimensions: 11.5" H x 17" W x 10" D