PlasmaFlo Features

• Harrick Plasma's PlasmaFlo is an optional process gas flow mixer and pressure monitor for use with Harrick Plasma's Plasma Cleaner models
• PlasmaFlo model available:

PDC-FMG-1 (115V); PDC-FMG-2 (230V)
Dual gas feeds for process gas mixing
Dual calibrated process gas flowmeters (1.0 SCFH & 2.0 SCFH)
Thermocouple vacuum gauge for measuring total chamber pressure
Weight: 7 lbs
Size: 8 1/2"H x 10"W x 8"D

Vacuum Pump Requirements

• Harrick Plasma's Plasma Cleaners require a vacuum pump with a minimum pumping speed of 1.4 m3/hr (0.83 cfm) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less

Vacuum Pump Features - Standard Pumps

Not intended for pumping oxygen; see below for suitable Oxygen Service Pumps

• Rotary vane pump
• Uses hydrocarbon oil (included with pump)
• Suitable for pumping inert process gases (e.g. room air, N2 or Ar)
• Includes hose, hose clamps, and hose adaptors to connect plasma cleaner to vacuum pump

PDC-VP-1 (115V); PDC-VP-2 (230V)
Premium Quality Model (higher reliability)
Pumping Speed (50/60 Hz): 3.2/3.6 m3/hr
Ultimate Total Pressure (gas ballast closed): 1.5 mTorr
Ultimate Total Pressure (gas ballast open): 23 mTorr
Motor Power (50/60 Hz): 250/300 W
Weight: 34 lbs
Size: 9"H x 15"W x 5"D

PDC-VP-OIL (1 quart)
Replacement oil for Premium Quality Vacuum Pumps PDC-VP-1, PDC-VP-2

PDC-VPE-1 (115V); PDC-VPE-2 (230V)
Basic Model (lower cost)
Pumping Speed (50/60 Hz): 5.1 m3/hr
Ultimate Total Pressure (gas ballast closed): 7.5 mTorr
Ultimate Total Pressure (gas ballast open): 150 mTorr
Motor Power (50/60 Hz): 373 W
Weight: 27 lbs
Size: 9 3/4"H x 14"W x 5 1/2 D"

PDC-VPE-OIL (1 quart)
Replacement oil for Basic Vacuum Pumps PDC-VPE-1, PDC-VPE-2

Vacuum Pump Features - Oxygen Service Pumps

• Suitable for pumping concentrated oxygen gas as well as inert gases (e.g. room air, N2 or Ar)
• Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard)
• Includes hose, hose clamps, inlet port adaptor, centering ring, and swing clamp to connect plasma cleaner to vacuum pump

PDC-OPF (115V); PDC-OPF-2 (230V)
Fomblin-Based Vacuum Pump for Oxygen Service (not including Fomblin Fluid)
Pumping speed: 3.3/3.9 m3/hr
Ultimate total pressure (gas ballast closed): 1.5 mTorr
Ultimate total pressure (gas ballast open): 23 mTorr
Motor power 50/60 Hz: 250/300 W
Weight: 48 lbs
Dimensions: 9” H x 17” W x 6” D

PDC-FMB (1kg; 0.532L)
Fomblin Fluid for Fomblin-Based Vacuum Pump PDC-OPF, PDC-OPF-2

PDC-OPD (115V); PDC-OPD-2 (230V)
Dry Scroll Vacuum Pump for Oxygen Service
Uses no oil or fluid
Pumping speed 50/60 Hz: 4.8/6 m3/hr
Ultimate total pressure (gas ballast closed): 53 mTorr
Ultimate total pressure (gas ballast open): 263 mTorr
Motor power 50/60 Hz: 250/300 W
Weight: 51 lbs
Dimensions: 11” H x 17” W x 10” D

Quartz Plasma Chamber Features

• Optional replacement for standard Pyrex vacuum chamber
• Beneficial for plasma processes that require extremely clean processing conditions

Quartz Sample Tray Features

• Useful for holding small samples for cleaning or treatment
• Sizes: 2 3/4" x 6 1/2" (for PDC-32G and PDC-32G-2); 5 1/2" x 6 1/2" (for PDC-001 and PDC-002)