PlasmaFlo Features

• The PlasmaFlo is an optional process gas flow mixer and pressure monitor for use with our Plasma Cleaners
• PlasmaFlo model available:

PDC-FMG (115V); PDC-FMG-2 (230V)
Dual gas feeds for process gas mixing
Dual process gas flowmeters
   49 mL/min and 104 mL/min maximum flowrate for atmospheric air (0 psig) *
   ±2% full scale accuracy
Thermocouple vacuum gauge and digital meter (1 to 1999 mTorr pressure range)
Weight: 7 lbs
Size: 8.5" H x 10" W x 8" D


* Maximum flowrate varies with process gas and regulated pressure. Correlated flowrate tables are available for the most common process gases (Air, Ar, N2, O2) used with our Plasma Cleaners and metered at 10 psig. Flowrate tables for other process gases and regulated pressures can be made available. Please inquire with Harrick Plasma.

Vacuum Pump Requirements

• Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (0.83 ft3/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less

Vacuum Pump Features - Standard Pumps

Not intended for pumping oxygen; see below for suitable Oxygen Service Pumps

• Rotary vane pump
• Uses hydrocarbon oil (included with pump)
• Suitable for pumping nonreactive or inert gases (e.g. Air, N2 or Ar)
• Includes hose, hose clamps, and hose adaptors to connect plasma cleaner to vacuum pump

PDC-VP (115V); PDC-VP-2 (230V)
Premium Quality Model (higher reliability)
Pumping Speed (50/60 Hz): 3.2/3.6 m3/hr
Ultimate Total Pressure (gas ballast closed): 1.5 mTorr
Ultimate Total Pressure (gas ballast open): 23 mTorr
Motor Power (50/60 Hz): 250/300 W
Weight: 34 lbs
Size: 9" H x 15" W x 5" D

PDC-VP-OIL (1 quart)
Replacement oil for Premium Quality Vacuum Pumps PDC-VP, PDC-VP-2

PDC-VPE (115V); PDC-VPE-2 (230V)
Basic Model (lower cost)
Pumping Speed (50/60 Hz): 5.1 m3/hr
Ultimate Total Pressure (gas ballast closed): 7.5 mTorr
Ultimate Total Pressure (gas ballast open): 150 mTorr
Motor Power (50/60 Hz): 373 W
Weight: 27 lbs
Size: 9.75" H x 14" W x 5.5" D

PDC-VPE-OIL (1 quart)
Replacement oil for Basic Vacuum Pumps PDC-VPE, PDC-VPE-2

Vacuum Pump Features - Oxygen Service Pumps

• Suitable for pumping concentrated oxygen gas as well as nonreactive or inert gases (e.g. Air, N2 or Ar)
• Does not use hydrocarbon oil (the combination of concentrated oxygen and hydrocarbon oil is an explosion hazard)
• Includes hose, hose clamps, inlet port adaptor, centering ring, and swing clamp to connect plasma cleaner to vacuum pump

PDC-OPF (115V); PDC-OPF-2 (230V)
Fomblin-Based Vacuum Pump for Oxygen Service (not including Fomblin Fluid)
Pumping speed (50/60 Hz): 3.3/3.9 m3/hr
Ultimate total pressure (gas ballast closed): 1.5 mTorr
Ultimate total pressure (gas ballast open): 90 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 48 lbs
Dimensions: 9" H x 17" W x 6" D

PDC-FMB (1kg; 0.532L)
Fomblin Fluid for Fomblin-Based Vacuum Pump PDC-OPF, PDC-OPF-2

PDC-OPD (115V); PDC-OPD-2 (230V)
Dry Scroll Vacuum Pump for Oxygen Service
Uses no oil or fluid
Pumping speed (50/60 Hz): 4.8/6 m3/hr
Ultimate total pressure (gas ballast closed; 50/60 Hz): 53/45 mTorr
Ultimate total pressure (gas ballast open; 50/60 Hz): 263/225 mTorr
Motor power (50/60 Hz): 250/300 W
Weight: 51 lbs
Dimensions: 11.5" H x 17" W x 10" D

Quartz Plasma Chamber Features

• Optional replacement for standard Pyrex vacuum chamber
• Beneficial for plasma processes that require extremely clean processing conditions

Quartz Sample Tray Features

• Useful for holding small samples for cleaning or treatment
• Tray size: 2.75" x 6.5" for the Basic Plasma Cleaner (PDC-32G, PDC-32G-2)
• Tray size: 5.5" x 6.5" for the Expanded Plasma Cleaner (PDC-001, PDC-002)