Plasma Products:
Plasma Cleaners

 

 

Expanded Plasma Cleaner & PlasmaFlo™
Expanded Plasma Cleaner &
PlasmaFlo™  [+]

Basic Plasma Cleaner & PlasmaFlo™
Basic Plasma Cleaner &
PlasmaFlo™  [+]


Features

  • Compact, tabletop unit
  • Adjustable RF power
  • Low, Medium, and High power settings
  • Two Plasma Cleaner models available:
    • PDC-001 (115V); PDC-002 (230V)
      — Expanded model
      — Includes a 6" diameter by 6 1/2" long Pyrex chamber and an integral switch for a vacuum pump
      — Its hinged cover features a magnetic closure and a viewing window
      — Applies a maximum of 30W to the RF coil
      — 1/8" NPT needle valve to control gas flow and chamber pressure
      — 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
      — Weight: 45 lbs
      — Size: 11"H x 18"W x 9"D
    • PDC-32G (115V); PDC-32G-2 (230V)
      — Basic model
      — Includes a 3" diameter by 6 1/2" long Pyrex chamber and a removable front cover assembly
      — Applies a maximum of 18W to the RF coil
      — 1/8" NPT needle valve to control gas flow and chamber pressure
      — 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
      — Weight: 13 lbs
      — Size: 8 1/2"H x 10"W x 8"D

  • Optional quartz Plasma Cleaner chamber
  • Optional flow mixer allows individually metered intakes for up to two different gases and monitors the pressure in the chamber
  • Compatible vacuum pump available

Requires

  • A vacuum pump with a minimum pumping speed of 1.4 m3/hr and a maximum ultimate total pressure of 200 mTorr

Power Settings

Description PDC-32G or PDC-32G-2 PDC-001 or PDC-002
Input Power 100W 200W
  Applied to the RF Coil
Low Setting 680V DC 10 mA DC 6.8W 716V DC 10 mA DC 7.16W
Medium Setting 700V DC 15 mA DC 10.5W 720V DC 15 mA DC 10.15W
High Setting 720V DC 25 mA DC 18W 740V DC 40 mA DC 29.6W