Features

• Compact, tabletop unit
• Adjustable RF power
• Low, Medium, and High power settings
• Two Plasma Cleaner models available:

PDC-001 (115V); PDC-002 (230V)
Expanded model
Includes a 6" diameter x 6.5" length Pyrex chamber and an integral switch for a vacuum pump
Its hinged cover features a magnetic closure and a viewing window
Applies a maximum of 30W to the RF coil
1/8" NPT needle valve to qualitatively control gas flow and chamber pressure
1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
Weight: 45 lbs
Size: 11" H x 18" W x 9" D

PDC-32G (115V); PDC-32G-2 (230V)
Basic model
Includes a 3" diameter x 6.5" length Pyrex chamber and a removable front cover assembly
Applies a maximum of 18W to the RF coil
1/8" NPT needle valve to qualitatively control gas flow and chamber pressure
1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
Weight: 13 lbs
Size: 8.5" H x 10" W x 8" D



• Optional PlasmaFlo gas mixer allows quantitative control of up to two (2) process gases and monitoring of chamber pressure
• Optional quartz chamber and sample tray
• Compatible vacuum pump available

Requirements

• Our Plasma Cleaners require a vacuum pump with a minimum pump speed of 1.4 m3/hr (0.83 ft3/min) and an ultimate total pressure of 200 mTorr (0.27 mbar) or less
• For pumping nonreactive gases (air, N2, Ar), see our Standard Vacuum Pumps.
• For pumping concentrated or pure oxygen gas, see our Oxygen Service Pumps.

Power Settings