
Expanded Plasma Cleaner &
PlasmaFlo™ [+]

Basic Plasma Cleaner &
PlasmaFlo™ [+]
Features
- Compact, tabletop unit
- Adjustable RF power
- Low, Medium, and High power settings
- Two Plasma Cleaner models available:
- PDC-001 (115V); PDC-002 (230V)
— Expanded model
— Includes a 6" diameter by 6 1/2" long Pyrex chamber and an integral switch for a vacuum pump
— Its hinged cover features a magnetic closure and a viewing window
— Applies a maximum of 30W to the RF coil
— 1/8" NPT needle valve to control gas flow and chamber pressure
— 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
— Weight: 45 lbs
— Size: 11"H x 18"W x 9"D
- PDC-32G (115V); PDC-32G-2 (230V)
— Basic model
— Includes a 3" diameter by 6 1/2" long Pyrex chamber and a removable front cover assembly
— Applies a maximum of 18W to the RF coil
— 1/8" NPT needle valve to control gas flow and chamber pressure
— 1/8" NPT 3-way valve to quickly switch from bleeding in gas, isolating the chamber, and venting
— Weight: 13 lbs
— Size: 8 1/2"H x 10"W x 8"D
- Optional quartz Plasma Cleaner chamber
- Optional flow mixer allows individually metered intakes for up to two different gases and monitors the pressure in the chamber
- Compatible vacuum pump available
Requires
- A vacuum pump with a minimum pumping speed of 1.4 m3/hr and a maximum ultimate total pressure of 200 mTorr
Power Settings
| Description |
PDC-32G or PDC-32G-2 |
PDC-001 or PDC-002 |
| Input Power |
100W |
200W |
| |
Applied to the RF Coil |
| Low Setting |
680V DC |
10 mA DC |
6.8W |
716V DC |
10 mA DC |
7.16W |
| Medium Setting |
700V DC |
15 mA DC |
10.5W |
720V DC |
15 mA DC |
10.15W |
| High Setting |
720V DC |
25 mA DC |
18W |
740V DC |
40 mA DC |
29.6W |